All Volumes

Volume 1 | Volume 2 | Volume 3 | Volume 4 | Volume 3+4 Set | Volume 5 | Volume 6 | 
Volume 7 | Volume 8 | Volume 9 | Volume 10 | Volume 11 | Volume 12 | Volume 13


Volume 1: Enabling Technology for MEMS and Nanodevices

ISBN 978-3-527-30746-3






Volume 2: CMOS-MEMS

ISBN 978-3-527-31080-7




Volume 3: Microengineering of Metals and Ceramics (Part I)
Design, Tooling, and Micro Injection Molding

ISBN 978-3-527-31208-5




Volume 4: Microengineering of Metals and Ceramics (Part II)
Special Replication Techniques, Automation, and Properties

ISBN 978-3-527-31493-5


Volume 3+4 as "Two-volume Set"

Microengineering of Metals and Ceramics
Part I: Design, Tooling, and Injection Molding
Part II: Special Replication Techniques, Automation, and Properties

ISBN 978-3-527-32378-4


Volume 5: Micro Process Engineering

ISBN 978-3-527-31246-7


Volume 6: Reliability of MEMS

ISBN 978-3-527-31494-2


Volume 7: LIGA and its Applications

ISBN 978-3-527-31698-4


Volume 8: Carbon Nanotube Device

ISBN 978-3-527-31720-2


Volume 9: Inkjet-based Micromanufacturing


ISBN 978-3-527-31904-6



Volume 10: System-level Modeling of MEMS


ISBN 978-3-527-31903-9



Volume 11: Resonant MEMS


ISBN 978-3-527-33545-9



Volume 12: Micro Energy Harvesting


ISBN 978-3-527-33545-9



Volume 13: Micro- and Nanomanipulation Tools


ISBN 978-3-527-33545-9